Organization
| International Advisory Board |
|
| D. R. Baer | Pacific Northwest National Laboratory, USA |
| I. S. Gilmore | National Physical Laboratory, UK |
| J. T. Grant | Dayton University, USA |
| A. Jablonski | Polish Academy of Science, Poland |
| L. Kövér | Institute of Nuclear Research of Hungarian Academy of Sciences (ATOMKI), Hungary |
| H. J. Mathieu | École Polytechnique Fédérale de Lausanne, Switzerland |
| C. J. Powell | National Institute of Standards and Technology, USA |
| M. P. Seah | National Physical Laboratory, UK |
| S. Tougaard | University of Southern Denmark, Denmark |
| Organizing Committee |
|
| S. Tanuma (Chair) | National Institute of Materials Science, Japan |
| K. Endo | Kanazawa University, Japan |
| Y. Fukuda | Shizuoka University, Japan |
| K. Goto | National Institute of Advanced Industrial Science and Technology, Japan |
| S. Ichimura | National Institute of Advanced Industrial Science and Technology, Japan |
| H. -J. Kang | Chungbuk University, Korea |
| K. Miura | HANTOK CHEMICALS Co., Korea |
| D. -W. Moon | Korea Research Institute of Standards and Science, Korea |
| K. Yoshihara | ULVAC-PHI, Japan |
| Executive Committee |
|
| S.Hashimoto (Chair) | JFE Techno-Research corp., Japan |
| K. -J. Kim (Vice-chair) | Korea Research Institute of Standards and Science, Korea |
| Program Committee |
|
| M. Suzuki (Chair) | ULVAC-PHI, Japan |
| Editorial Committee |
|
| S. Fukushima (Chair) | National Institute of Materials Science, Japan |
| SYMPOSIUM SECRETARY |
|
| D. Fujita | National Institute of Materials Science, Japan |